Resist-based lithographic tools, such as electron beam (e-beam) and photolithography, drive today’s state-of-the-art nanoscale fabrication. However, the multistep nature of these processes, expensive ...

In this work an innovative microelectrode was successfully fabricated using photolithography for determination of dissolved oxygen distributions in aerobic granules, which were sampled from a ...

The Hong Kong University of Science and Technology (HKUST)-led research team has adopted gyromagnetic double-zero-index metamaterials (GDZIMs)—a new optical extreme-parameter material—and ...

This work focuses on the scheduling of a photolithography area with multiple machine groups and each one consists of a predetermined number of photolithography machines (PMs). PMs belonging to the ...

Notably, we have achieved a 9000 times reduction in manufacturing costs, a critical breakthrough for the project’s viability. This cost reduction stems from surpassing the MFS threshold set by ...