However, MEMS technology has altered or enhanced some of these techniques, as well as added new processes, in order to build mechanical devices such as microfluidic channels, gears, cantilevers, micro ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices ... Our recent work has fabricated hemispherical ...

There are MEMS temperature sensors, magnetic field sensors, radiation sensors, and more. There are microscopic motors that use electrostatic force instead of electromagnetic, micro gas valves ...

“In this work, an attempt was made to design and implement a single tracking motor with dual axis ... sensor and a micro-electromechanical solar (MEMS) sensor. “The UV sensor calculates ...